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Breaking Bad's farewell tour went out on a high note, as the AMC drama won five awards including drama series at Monday's Primetime Emmy Awards, while Modern Family completed a historic five-peat.

Bad, which also scored drama series last year, became the sixth show to win for its final season after The Dick Van Dyke Show, The Mary Tyler Moore Show, Barney Miller, Everybody Loves Raymond and The Sopranos. It's also the first to win the top prizes at the Golden Globes, Screen Actors Guild Awards and Emmys in one year since Mad Men in 2010.

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Modern Family won comedy series, joining Frasier as the only shows to five-peat in either series race.

All three of Bad's nominated actors — Bryan Cranston, Aaron Paul and Anna Gunn — won and the seminal "Ozymandias" took home drama writing. With his fourth drama actor trophy, Cranston tied Dennis Franz for most victories in the category and denied Matthew McConaughey (True Detective) the chance to become the first man and fourth person to win an Oscar and Emmy in the same year.

Paul became the first person to win drama supporting actor three times, while Gunn defended her 2013 supporting actress crown.

After not even getting nominated last year, Julianna Margulies took home her third Emmy and second one for The Good Wife in drama actress. The legal drama has now won an acting Emmy for five straight years.

The comedy acting races featured repeat winners. Jim Parsons scored his fourth Emmy in comedy actor for The Big Bang Theory to tie Carroll O'Connor, Michael J. Fox and Kelsey Grammer for most wins in the category. He has at least three more seasons to claim solo ownership of that record. In comedy actress, Julia Louis-Dreyfus won her third straight trophy for Veep and her fifth overall. She's the first to three-peat since Helen Hunt won four in a row.

Ty Burrell, who won in 2011, picked up his second comedy supporting actor trophy for Modern Family. He's the seventh person to win the category twice, following co-star Eric Stonestreet, who did it two years ago.

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Allison Janney nabbed her sixth Emmy in comedy supporting actress for Mom and her second this year after winning for her guest turn on Masters of Sex last week. She joins Art Carney, Carl Reiner and Tyne Daly as six-time Emmy acting winners (Cloris Leachman leads with eight). Janney is also the first person to win two acting Emmys in one year since her West Wing co-star Stockard Channing did it in 2002.

The night's biggest surprises came in the TV movie/miniseries categories. Sherlock: His Last Vow claimed three trophies for lead actor Benedict Cumberbatch, supporting actor Martin Freeman — who upset heavy favorite Matt Bomer (The Normal Heart) — and TV movie/miniseries writing. The PBS series, which won four awards at the Creative Arts, lost the miniseries and directing prizes to Fargo.

American Horror Story: Coven's Jessica Lange won her second Emmy for AHS and third overall, while co-star Kathy Bates snagged the supporting trophy over favorites Julia Roberts (The Normal Heart) and Allison Tolman (Fargo).

The Normal Heart avoided a shutout on the night by winning TV movie, which means Brad Pitt, who produced it, has an Emmy to go with his Best Picture Oscar for 12 Years a Slave.

Other winners include The Amazing Race — for the 10th time — for reality-competition program, Louis C.K. (Louie) for comedy writing, Modern Family's Gail Mancuso for comedy directing and Sarah Silverman for variety special writing (Sarah Silverman: We Are Miracles).

See the full list of winners below.

Drama Series: Breaking Bad

Comedy Series: Modern Family

Lead Actor in a Drama Series
: Bryan Cranston, Breaking Bad

Lead Actress in a Drama Series
: Julianna Margulies, The Good Wife

Supporting Actor in a Drama Series: Aaron Paul, Breaking Bad

Supporting Actress in a Drama Series
: Anna Gunn, Breaking Bad

Directing for a Drama Series:
Cary Joji Fukunaga, True Detective, "Who Goes There"

Writing for a Drama Series: Moira Walley-Beckett, Breaking Bad, "Ozymandias"

Lead Actor in a Comedy Series
: Jim Parsons, The Big Bang Theory

Lead Actress in a Comedy Series
: Julia Louis-Dreyfus, Veep

Supporting Actor in a Comedy Series: Ty Burrell, Modern Family

Supporting Actress in a Comedy Series: Allison Janney, Mom

Directing for a Comedy Series: Gail Mancuso, Modern Family, "Las Vegas"

Writing for a Comedy Series: Louis C.K., Louie, "So Did the Fat Lady"

Miniseries: Fargo

TV Movie: The Normal Heart

Actor in a TV Movie/Miniseries: Benedict Cumberbatch, Sherlock: His Last Vow

Actress in a TV Movie/Miniseries: Jessica Lange, American Horror Story: Coven

Supporting Actor in a TV Movie/Miniseries: Martin Freeman, Sherlock: His Last Vow

Supporting Actress in a TV Movie/Miniseries: Kathy Bates, American Horror Story: Coven

Directing for a TV Movie/Miniseries: Colin Bucksey, Fargo, "Burdian's Ass"

Writing for a TV Movie/Miniseries: Steven Moffat, Sherlock: His Last Vow

Reality-Competition Program: The Amazing Race

Variety Series
: The Colbert Report

Variety Special Directing: Glenn Weiss, 67th Tony Awards

Variety Special Writing: Sarah Silverman, Sarah Silverman: We Are Miracles