Jesse Tyler Ferguson, Sofia Vergara

Modern Family topped Wednesday, but fell to a finale low.

The Season 4 closer drew 9.9 million viewers and a 3.6 in the adults 18-to-49 demographic, down half a point from last year and one-tenth from last week. The rest of ABC's finales — The Middle  (7.5 million, 2.0), How to Live with Your Parents (For the Rest of Your Life) (6.3 million, 2.2) and Nashville (5.6 million, 1.9) — all grew week-to-week.

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CBS' two-hour Criminal Minds finale (10.8 million, 2.7) grew a tenth from last week, but was down almost a full point from last year's finale.

On NBC, Law & Order: Special Victims Unit (6.7 million, 1.6) fell four-tenths from last year's finale, while Chicago Fire closed out its first season to 6.2 million and a 1.7.

Fox's MasterChef returned to 5.1 million and a 2.0, down three-tenths from last season's premiere.